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When you use the Quartus II 7.0 to perform a SignalProbe compilation that targets either a Cyclone III device or a Stratix III device, you may receive an internal error.
The reason is that Quartus II 7.0 does not support programming/config file generation for Cyclone III and Stratix III devices. Programming/config file support and support for SignalProbe for Cyclone III and Stratix III devices will be supported post QII 7.0.