Forum Discussion
Altera_Forum
Honored Contributor
13 years ago --- Quote Start --- I found a description of ADXL MEMS sensor geometry and detection principle in this ADI literature, at page 3-15 f http://www.analog.com/library/analogdialogue/archives/43-09/edch%203%20sensors.pdf --- Quote End --- FvM : thanks for clarifying. Couple of questions : 1. The essential principle of operation for ADXL is Figure 3.14 on p. 18 in the document above, correct? 2. Going through the first paragraph under figure 3.14, the deflection of the beam produces a change in capacitance AND this change in capacitance is sensed using a mismatch in phase between the 1 MHz square waves (hence, the concept of "AC capacitance")? Thanks again. Bart