Error (18948): Error message received from device: Detected bitstream error.

We use Quartus 20.2 programmer to download a .sof file to device(1SX280LN3F43E2VG), by JTAG(usb-blaster), and meet the problem below:

Error (18950): Device has stopped receiving configuration data

Error (18948): Error message received from device: Detected bitstream error. Please make sure that the bitstream is compatible with the current Quartus version and device version. (Subcode 0x0040, Info 0x00000003, Location 0x0000A800)

Error (209012): Operation failed

The .sof file is generated by Quartus Prime Pro 20.2

I would like to know what happened and how to fix it, thank you!